10 Patents
- US125923572026System and Method for Multi-beam Electron Microscopy Using a Detector Array
KLA Corporation
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- US121911092025Sample Pre-charging Methods and Apparatuses for Charged Particle Beam Inspection
ASML Netherlands B.V.
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- US121658372024System and Method for Scanning a Sample Using Multi-beam Inspection Apparatus
ASML Netherlands B.V.
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- US117494952023Bandpass Charged Particle Energy Filtering Detector for Charged Particle Tools
KLA Corp.
0 cites - US116767922023Sample Pre-charging Methods and Apparatuses for Charged Particle Beam Inspection
ASML Netherlands, B.V
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