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Inventors
You Sun Jung
Busan
KR
3 patents
4 Patents
US12615987
2026
Substrate Processing Apparatus and System Including the Same
KCTECH CO., Ltd.
0 cites
US12451370
2025
Substrate Processing System with Vertical Arrangement Structure
KCTECH Co., Ltd.
0 cites
US11883857
2024
Cleaning Solution Detection Device
KCTECH CO., Ltd.
0 cites
US11701693
2023
Substrate Processing Device Comprising Door Unit Having Inclined Surface
KCTECH CO., Ltd.
0 cites