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Inventors
Yoshiyuki Oshida
Tokyo
JP
3 patents
3 Patents
US12175569
2024
Terminal Device and RF Power Supply Device
HITACHI KOKUSAI ELECTRIC Inc.
0 cites
US11901159
2024
RF Generator Device and Substrate Processing Apparatus
HITACHI KOKUSAI ELECTRIC Inc.
0 cites
US11810759
2023
RF Generator
HITACHI KOKUSAI ELECTRIC Inc.
0 cites