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Inventors
Yoshiyuki Kondo
Yamanashi
JP
5 patents
5 Patents
US12567563
2026
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US12338532
2025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US12129544
2024
Cleaning Method and Plasma Treatment Device
TOKYO ELECTRON LIMITED
0 cites
US12060641
2024
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11982501
2024
Flow Path Resistor and Heat Exchanger
MITSUBISHI HEAVY INDUSTRIES, Ltd.
0 cites