Patents/Inventors

Yoshitomo Nakagawa

TokyoJP1 patent

2 Patents

US119068992024
Mask Defect Repair Apparatus and Mask Defect Repair Method
HITACHI HIGH-TECH SCIENCE CORPORATION
0 cites
US117215172023
Focused Ion Beam Processing Apparatus
HITACHI HIGH-TECH SCIENCE CORPORATION
0 cites