Patents/Inventors

Yoshitomo Konta

MiyagiJP2 patents

3 Patents

US120875532024
Gas Supply Ring and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118624362024
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117911952023
Substrate Processing Apparatus
Tokyo Electron Limited
0 cites