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Inventors
Yoshitaka Abe
Toyama
JP
3 patents
4 Patents
US12467689
2025
Furnace Opening Structure, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
US12141569
2024
Redundant System and Load Drive Control Device
Hitachi Astemo, Ltd.
0 cites
US11986847
2024
Nozzle Installation Jig
KOKUSAI ELECTRIC CORPORATION
0 cites
US11633753
2023
Nozzle Installation Jig
KOKUSAI ELECTRIC CORPORATION
0 cites