Patents/Inventors

Yoshisada Ebata

TokyoJP3 patents

3 Patents

US125910832026
Method for Manufacturing Diffraction Grating and Method for Manufacturing Replica Grating
HITACHI HIGH-TECH CORPORATION
0 cites
US124873832025
Concave Diffraction Grating and Optical Device
Hitachi High-tech Corporation
0 cites
US123602982025
Diffraction Grating, Method for Manufacturing Diffraction Grating, and Photomask
HITACHI HIGH-TECH CORPORATION
0 cites