Yoshio Susa

8 Patents

• US125710912026

  Method for Forming Carbon Film and Film Forming Apparatus

  ASM IP Holding B.V.

  0 cites
• US125060002025

  Method of Filling Gap with Flowable Carbon Layer

  ASM IP Holding B.V.

  0 cites
• US123851312025

  Method of Forming a Structure Including a Silicon Carbide Layer

  ASM IP Holding B.V.

  0 cites
• US121257002024

  Method of Forming High Aspect Ratio Features

  ASM IP Holding B.V.

  0 cites
• US120401772024

  Methods for Forming a Laminate Film by Cyclical Plasma-enhanced Deposition Processes

  ASM IP Holding B.V.

  0 cites
• US117053332023

  Structures Including Multiple Carbon Layers and Methods of Forming and Using Same

  ASM IP Holding B.V.

  0 cites
• US116461972023

  Method for Depositing Silicon-free Carbon-containing Film as Gap-fill Layer by Pulse Plasma-assisted Deposition

  ASM IP Holding B.V.

  0 cites
• US116263162023

  Method of Depositing Carbon-containing Material on a Surface of a Substrate, Structure Formed Using the Method, and System for Forming the Structure

  ASM IP Holding B.V.

  0 cites