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Inventors
Yoshihiro Uozumi
Shinagawa
JP
4 patents
4 Patents
US12068267
2024
Semiconductor Device and Method for Manufacturing the Same
Kioxia Corporation
0 cites
US11921428
2024
Substrate Processing Method and Substrate Processing Apparatus
Kioxia Corporation
0 cites
US11621239
2023
Semiconductor Device and Method for Manufacturing the Same
Kioxia Corporation
0 cites
US11581277
2023
Semiconductor Device and Method for Manufacturing the Same
Kioxia Corporation
0 cites