Patents/Inventors

Yoshihiro Umezawa

MiyagiJP2 patents

3 Patents

US123409752025
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119357312024
Plasma Processing Apparatus, Plasma State Detection Method, and Plasma State Detection Program
TOKYO ELECTRON LIMITED
0 cites
US118043662023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites