Patents/Inventors

Yoshihiro Takezawa

YamanashiJP8 patents

8 Patents

US125711252026
Method for Forming Polycrystalline Silicon Film
Tokyo Electron Limited
0 cites
US123519042025
Film Deposition Method and Method for Forming Polycrystalline Silicon Film
Tokyo Electron Limited
0 cites
US122527862025
Cleaning Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US121129472024
Method of Crystallizing Amorphous Silicon Film and Deposition Apparatus
Tokyo Electron Limited
0 cites
US120805522024
Method of Depositing Silicon Film and Film Deposition Apparatus
Tokyo Electron Limited
0 cites
US120273842024
Heat Treatment Apparatus and Dummy Substrate Processing Method
Tokyo Electron Limited
0 cites
US117495302023
Method of Removing Phosphorus-doped Silicon Film and System Therefor
Tokyo Electron Limited
0 cites
US115877872023
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites