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Inventors
Yoshihiro Satou
Tokyo
JP
2 patents
3 Patents
US12444629
2025
Substrate Inspection Device
Hitachi High-tech Corporation
0 cites
US12366539
2025
Surface Inspection Device
Hitachi High-tech Corporation
0 cites
US11946858
2024
Examination Device
HITACHI HIGH-TECH CORPORATION
0 cites