Yoshihiro Kuwano

2 Patents

• US123200342025

  Method of Heat-treating Silicon Wafer Using Lateral Heat Treatment Furnace

  SUMCO CORPORATION

  0 cites
• US121836002024

  Method of Determination of Pretreatment Conditions of Heat Treatment Furnace, Method of Pretreatment of Heat Treatment Furnace, Heat Treatment Device, and Manufacturing Method and Manufacturing Device of Heat-treated Semiconductor Wafer

  SUMCO CORPORATION

  0 cites