Patents/Inventors

Yoshihiro Kato

YamanashiJP16 patents

9 Patents

US126010482026
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124943692025
Extreme Ultraviolet Lithography Patterning Method
Tokyo Electron Limited
0 cites
US123615362025
EUV Mask Inspection Device, EUV Mask Inspection Method, Non-transitory Computer-readable Medium Storing EUV Mask Inspection Program, and EUV Mask Inspection System Including a Gray Image Based on Design Data of a Pattern
LASERTEC CORPORATION
0 cites
US121192772024
Method for Producing Package Substrate for Mounting Semiconductor Device
MITSUBISHI GAS CHEMICAL COMPANY, Inc.
0 cites
US119903492024
Method for Producing Package Substrate for Loading Semiconductor Device
MITSUBISHI GAS CHEMICAL COMPANY, Inc.
0 cites
US119159312024
Extreme Ultraviolet Lithography Patterning Method
Tokyo Electron Limited
0 cites
US118773962024
Laminate, Metal Foil-clad Laminate, Laminate Having Patterned Metal Foil, Laminate Having Buildup Structure, Printed Wiring Board, Multilayer Coreless Substrate, and Method for Producing Same
MITSUBISHI GAS CHEMICAL COMPANY, Inc.
0 cites
US118222332023
Image Pickup Apparatus and Focus Adjustment Method Using Bending Correction to Adjust Focusing
Lasertec Corporation
0 cites
US116642402023
Method for Producing Laminate Having Patterned Metal Foil, and Laminate Having Patterned Metal Foil
MITSUBISHI GAS CHEMICAL COMPANY, Inc.
0 cites