Patents/Inventors

Yoshifumi Ueno

OyamaJP6 patents

5 Patents

US125502452026
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US125324012026
EUV Light Generation System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US124552312025
EUV Light Generation Apparatus, Electronic Device Manufacturing Method, and Inspection Method
GIGAPHOTON Inc.
0 cites
US119407362024
Tin Trap Device, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US115535832023
Extreme Ultraviolet Light Generation System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites