Patents/Inventors

Yoshifumi Ogawa

TokyoJP2 patents

3 Patents

US124498252025
Gas Supply Control Device
Hitachi High-tech Corporation
0 cites
US124424552025
Gas Supply Apparatus, Vacuum Processing Apparatus, and Gas Supply Method
Hitachi High-tech Corporation
0 cites
US118354652023
Detecting Method and Detecting Device of Gas Components and Processing Apparatus Using Detecting Device of Gas Components
HITACHI HIGH-TECH CORPORATION
0 cites