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Inventors
Yoshiaki Daigo
Tokyo
JP
4 patents
5 Patents
US12392052
2025
Film Deposition Method
Nuflare Technology, Inc.
0 cites
US12179223
2024
Rectifying Plate, Fluid-introducing Apparatus, and Film-forming Apparatus
Nuflare Technology, Inc.
0 cites
USD1047884
2024
Susceptor Cover
Nuflare Technology, Inc.
0 cites
USD1037186
2024
Susceptor Ring
Nuflare Technology, Inc.
0 cites
US11749525
2023
Vapor Phase Growth Apparatus and Vapor Phase Growth Method
Nuflare Technology, Inc.
0 cites