Patents/Inventors

Yoram Uziel

Milpitas, CAUS22 patents

16 Patents

US126191622026
Extra Tall Target Metrology
KLA Corporation
0 cites
US124871902025
System and Method for Isolation of Specific Fourier Pupil Frequency in Overlay Metrology
KLA Corporation
0 cites
US123796692025
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US123705812025
In-situ Process Chamber Chuck Cleaning by Cleaning Substrate
KLA Corporation
0 cites
US123277412025
Oscillating Secondary Stage for Frame-mode Overlay Metrology
KLA Corporation
0 cites
US121319592024
Systems and Methods for Improved Metrology for Semiconductor Device Wafers
KLA Corporation
0 cites
US120011482024
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites
US119675352024
On-product Overlay Targets
KLA CORPORATION
0 cites
US119337172024
Sensitive Optical Metrology in Scanning and Static Modes
KLA Corporation
0 cites
US118993752024
Massive Overlay Metrology Sampling with Multiple Measurement Columns
KLA Corporation
0 cites
US117139592023
Overlay Metrology Using Spectroscopic Phase
KLA Corporation
0 cites
US116444192023
Measurement of Properties of Patterned Photoresist
KLA Corporation
0 cites
US116389382023
In Situ Process Chamber Chuck Cleaning by Cleaning Substrate
KLA Corporation
0 cites
US116370302023
Multi-stage, Multi-zone Substrate Positioning Systems
KLA Corporation
0 cites
US116077162023
Systems and Methods for Chuck Cleaning
KLA Corporation
0 cites
US115927552023
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites