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Inventors
Yoonki Min
Seoul
KR
3 patents
3 Patents
US11676812
2023
Method for Forming Silicon Nitride Film Selectively on Top/bottom Portions
ASM IP Holding B.V.
0 cites
US11562901
2023
Substrate Processing Method
ASM IP Holding B.V.
0 cites
US11551925
2023
Method for Manufacturing a Semiconductor Device
ASM IP Holding B.V.
0 cites