Patents/Inventors

Yoon Sang Lee

Suwon-siKR2 patents

2 Patents

US125851972026
Monitoring Unit and Substrate Treating Apparatus Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122268452025
Apparatus and Method for Cleaning Oxide Film
PUKYONG NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION
0 cites