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Inventors
Yoon Jong Ju
Cheonan-si
KR
4 patents
4 Patents
US12341030
2025
Support Unit and Substrate Treating Apparatus
SEMES CO., Ltd.
0 cites
US12315699
2025
Substrate Treating Apparatus and Substrate Treating Method
SEMES CO., Ltd.
0 cites
US12176185
2024
Apparatus and Method for Processing Substrate Using Plasma
SEMES CO., Ltd.
0 cites
US11978654
2024
Substrate Processing Apparatus
SEMES CO., Ltd.
0 cites