Patents/Inventors

Yongfa Fan

Sunnyvale, CAUS4 patents

4 Patents

US125055242025
Method for Training or Using a Process Model for Determining a Pattern in a Patterning Process
ASML NETHERLANDS B.V.
0 cites
US124682322025
Etch Bias Characterization and Method of Using the Same
ASML NETHERLANDS B.V.
0 cites
US123395912025
Determining Metrics for a Portion of a Pattern on a Substrate
ASML NETHERLANDS B.V.
0 cites
US116752742023
Etch Bias Characterization and Method of Using the Same
ASML NETHERLANDS B.V.
0 cites