26 Patents
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- US124889862025Selective Gas Etching for Self-aligned Pattern Transfer
Adeia Semiconductor Solutions LLC
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- US123277302025Two-color Self-aligned Double Patterning (SADP) to Yield Static Random Access Memory (SRAM) and Dense Logic
Adeia Semiconductor Solutions LLC
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- US121115722024Methods of Greytone Imprint Lithography to Fabricate Optical Devices
APPLIED MATERIALS, Inc.
0 cites - US120947742024Back-end-of-line Single Damascene Top via Spacer Defined by Pillar Mandrels
International Business Machines Corporation
0 cites - US120876012024Reducing Line Edge Roughness and Mitigating Defects by Wafer Freezing
International Business Machines Corporation
0 cites - US120854752024Method to Determine Line Angle and Rotation of Multiple Patterning
Applied Materials, Inc.
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- US119786392024Two-color Self-aligned Double Patterning (SADP) to Yield Static Random Access Memory (SRAM) and Dense Logic
Tessera LLC
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- US118158232023Alignment Mark for Front to Back Side Alignment and Lithography for Optical Device Fabrication
APPLIED MATERIALS, Inc.
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- US117094232023Methods of Greytone Imprint Lithography to Fabricate Optical Devices
Applied Materials, Inc.
0 cites - US116995912023Two-color Self-aligned Double Patterning (SADP) to Yield Static Random Access Memory (SRAM) and Dense Logic
Tessera LLC
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- US115437932023Developer Critical Dimension Control with Pulse Development
International Business Machines Corporation
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