Patents/Inventors

Yong Min Yoo

Cheonan-siKR2 patents

3 Patents

US122701182025
Substrate Supporting Plate, Thin Film Deposition Apparatus Including the Same, and Thin Film Deposition Method
ASM IP Holding B.V.
0 cites
US121881212025
Method of Depositing Silicon Oxide Films
ASM Genitech Korea Ltd.
0 cites
US119652622024
Substrate Supporting Plate, Thin Film Deposition Apparatus Including the Same, and Thin Film Deposition Method
ASM IP Holding B.V.
0 cites