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Inventors
Yong-dae Kim
Daegu
KR
3 patents
3 Patents
US12541144
2026
Phase Shift Blankmask and Photomask for EUV Lithography
S&S TECH Co., Ltd.
0 cites
US11940725
2024
Phase Shift Blankmask and Photomask for EUV Lithography
S&S Tech Co., Ltd.
0 cites
US11927880
2024
Phase Shift Blankmask and Photomask for EUV Lithography
S&S TECH Co., Ltd.
0 cites