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Inventors
Yonatan Vaknin
Yoqneam Llit
IL
19 patents
10 Patents
US12601979
2026
Multi-column Large Field of View Imaging Platform
KLA Corporation
0 cites
US12585200
2026
Imaging Overlay with Mutually Coherent Oblique Illumination
KLA Corporation
0 cites
US12560548
2026
Spectral Angular Metrology
KLA Corporation
0 cites
US12422363
2025
Scanning Scatterometry Overlay Metrology
KLA Corporation
0 cites
US12399435
2025
Grating-over-grating Overlay Measurement with Parallel Color per Layer
KLA Corporation
0 cites
US12066322
2024
Single Grab Overlay Measurement of Tall Targets
KLA Corporation
0 cites
US12032300
2024
Imaging Overlay with Mutually Coherent Oblique Illumination
KLA Corporation
0 cites
US12001148
2024
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites
US11800212
2023
Multi-directional Overlay Metrology Using Multiple Illumination Parameters and Isolated Imaging
KLA Corporation
0 cites
US11592755
2023
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites