Patents/Inventors

Yoichi Harayama

NaganoJP3 patents

4 Patents

US122305272025
Electrostatic Chuck and Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US118307522023
Substrate Fixing Device, Electrostatic Chuck, and Method of Manufacturing Electrostatic Chuck
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US116996122023
Substrate Fixing Device, Electrostatic Chuck and Electrostatic Chuck Manufacturing Method
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites
US116315982023
Substrate Fixing Device
SHINKO ELECTRIC INDUSTRIES CO., Ltd.
0 cites