Patents/Inventors

Yohei Yamazawa

MiyagiJP9 patents

9 Patents

US125867622026
Filter Circuit
TOKYO ELECTRON LIMITED
0 cites
US124943442025
Antenna for Inductively Coupled Plasma Excitation, Antenna Unit for Inductively Coupled Plasma Excitation, and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124513272025
Apparatus for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US122241642025
Radio Frequency (RF) System with Embedded RF Signal Pickups
Tokyo Electron Limited
0 cites
US121761832024
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites
US119903182024
Filter Circuit
TOKYO ELECTRON LIMITED
0 cites
US118323732023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118172962023
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites
US116004742023
RF Voltage and Current (V-I) Sensors and Measurement Methods
Tokyo Electron Limited
0 cites