Patents/Inventors

Yohei Yamawaki

KumamotoJP4 patents

4 Patents

US125435252026
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US124590072025
Separating Apparatus and Separating Method
Tokyo Electron Limited
0 cites
US121424832024
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US119698272024
Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites