Patents/Inventors

Yohei Uchida

MiyagiJP8 patents

10 Patents

US122939372025
Plasma Processing Apparatus and Mounting Table Thereof
TOKYO ELECTRON LIMITED
0 cites
US120464572024
Electrostatic Chuck, Focus Ring, Support Base, Plasma Processing Apparatus, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US119843002024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119423572024
Workpiece Placement Apparatus and Processing Apparatus
Tokyo Electron Limited
0 cites
US118255892023
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117953462023
Polishing Liquid Composition for Silicon Oxide Film
KAO CORPORATION
0 cites
US117179122023
Capillary Guide Device and Wire Bonding Apparatus
SHINKAWA Ltd.
0 cites
USD09926142023
Focus Ring
Tokyo Electron Limited
0 cites
USD09926152023
Focus Ring
Tokyo Electron Limited
0 cites
US116004712023
Substrate Support, Plasma Processing Apparatus, and Focus Ring
TOKYO ELECTRON LIMITED
0 cites