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Inventors
Yogananda Sarode
Bangalore
IN
1 patent
2 Patents
US12412769
2025
Electrostatic Chucks with Hybrid Pucks to Improve Thermal Performance and Leakage Current Stability
Applied Materials, Inc.
0 cites
US12183605
2024
In-situ Semiconductor Processing Chamber Temperature Apparatus
Applied Materials, Inc.
0 cites