22 Patents
- US125675582026Systems and Methods for Pulsed Voltage Contrast Detection and Capture of Charging Dynamics
ASML Netherlands B.V.
0 cites - US124943422025Systems and Methods for Charged Particle Flooding to Enhance Voltage Contrast Defect Signal
ASML Netherlands B.V.
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- US123680672025Method, Apparatus, and System for Dynamically Controlling an Electrostatic Chuck During an Inspection of Wafer
ASML Netherlands B.V.
0 cites - US122179272025Beam Manipulation of Advanced Charge Controller Module in a Charged Particle System
ASML Netherlands B.V.
0 cites - US121424512024System for Inspecting and Grounding a Mask in a Charged Particle System
ASML Netherlands B.V.
0 cites - US121424562024Self-differential Confocal Tilt Sensor for Measuring Level Variation in Charged Particle Beam System
ASML NETHERLANDS B.V.
0 cites - US121256692024Thermal-aided Inspection by Advanced Charge Controller Module in a Charged Particle System
ASML Netherlands B.V.
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- US119292322024Systems and Methods for Charged Particle Flooding to Enhance Voltage Contrast Defect Signal
ASML Netherlands B.V.
0 cites - US118154732023Methods of Inspecting Samples with Multiple Beams of Charged Particles
ASML Netherlands B.V.
0 cites - 0 cites
- US117281312023Thermal-aided Inspection by Advanced Charge Controller Module in a Charged Particle System
ASML Netherlands B.V.
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