Patents/Inventors

Yiwen Fan

Fremont, CAUS8 patents

8 Patents

US125108252025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US125108262025
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US124179022025
Method for Cleaning a Chamber
Lam Research Corporation
0 cites
US122665422025
Atomic Layer Etching for Subtractive Metal Etch
Lam Research Corpporation
0 cites
US122566452025
Chemical Etch Nonvolatile Materials for MRAM Patterning
Lam Research Corporation
0 cites
US121054222024
Photoresist Development with Halide Chemistries
Lam Research Corporation
0 cites
US119357582024
Atomic Layer Etching for Subtractive Metal Etch
Lam Research Corporation
0 cites
US116925592023
Micro Hydraulic Suspension Mechanical Pump and Assembling Method Thereof
HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY
0 cites