8 Patents
- US123343332025Methods for Patterning a Silicon Oxide-silicon Nitride-silicon Oxide Stack and Structures Formed by the Same
Taiwan Semiconductor Manufacturing Company Limited
0 cites - US122642072025Water-responsive Materials and Uses Therefor
Research Foundation Of The City University Of New York
0 cites - US121856312024Pizoelectric MEMS Device with Electrodes Having Low Surface Roughness
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US121519322024Microelectromechanical Systems Device Having a Mechanically Robust Anti-stiction/outgassing Structure
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US121348242024Undercut-free Patterned Aluminum Nitride Structure and Methods for Forming the Same
Taiwan Semiconductor Manufacturing Company Limited
0 cites - US118142832023Microelectromechanical Systems Device Having a Mechanically Robust Anti-stiction/outgassing Structure
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US118126642023Pizoelectric MEMS Device with Electrodes Having Low Surface Roughness
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US116975882023Structure for Microelectromechanical Systems (MEMS) Devices to Control Pressure at High Temperature
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites