14 Patents
- US125403962026System and Method for Monitoring and Performing Thin Film Deposition
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123680662025System and Method for Correcting Non-ideal Wafer Topography
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US123449292025Multi-functional Shutter Disk for Thin Film Deposition Chamber
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123410422025Method for Depositing Target Material in Deposition Chamber with Tiltable Workpiece Holder
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- 0 cites
- 0 cites
- US120339652024Semiconductor Device and Method of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119202372024Providing Multifunctional Shutter Disk Above the Workpiece in the Multifunctional Chamber During Degassing or Pre-cleaning of the Workpiece, and Storing the Multifunctional Shutter Disc During Deposition Process in the Same Multifunctional Chamber
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US117422312023Movable Wafer Holder for Film Deposition Chamber Having Six Degrees of Freedom
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- 0 cites
- US116826392023Semiconductor Device and Method of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites