Patents/Inventors

Yi-ko Chen

HsinchuTW1 patent

2 Patents

US123157372025
Feature Patterning Using Pitch Relaxation and Directional End-pushing with Ion Bombardment
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116886102023
Feature Patterning Using Pitch Relaxation and Directional End-pushing with Ion Bombardment
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites