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Inventors
Yerim Yeon
Suwon-si
KR
3 patents
3 Patents
US12312688
2025
Precursors and Related Methods
ENTEGRIS, Inc.
0 cites
US12046466
2024
Method and Apparatus for Treating Substrate
SEMES CO., Ltd.
0 cites
US11977332
2024
Substrate Treating Apparatus and Substrate Treating Method
Research & Business Foundation SUNGKYUNKWAN UNIVERSITY
0 cites