Yen-tien Lu

5 Patents

• US125989322026

  Methods and Structures for Improving Etch Profile of Underlying Layers

  Tokyo Electron Limited

  0 cites
• US117567902023

  Method for Patterning a Dielectric Layer

  Tokyo Electron Limited

  0 cites
• US117422412023

  ALD (atomic Layer Deposition) Liner for via Profile Control and Related Applications

  TOKYO ELECTRON LIMITED

  0 cites
• US117215782023

  Split Ash Processes for via Formation to Suppress Damage to Low-k Layers

  Tokyo Electron Limited

  0 cites
• US116886042023

  Method for Using Ultra Thin Ruthenium Metal Hard Mask for Etching Profile Control

  Tokyo Electron Limited

  0 cites