165 Patents
- US126222452026Ion Implant Process for Defect Elimination in Metal Layer Planarization
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US125686482026Backside Source/drain Contacts and Methods of Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US125576122026Bonding System with Sealing Gasket and Method for Using the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US125576232026Semiconductor Device with Connecting Structure Having a Doped Layer and Method for Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US125573672026Source/drain Regions Formed Using Metal Containing Block Masks
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US125573142026Gate-all-around Field-effect Transistor Device
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US125385442026Method for Manufacturing Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US125325182026Transistor Source/drain Regions and Methods of Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US125016472025Semiconductor Device and Method of Manufacture
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124890022025Annealing Apparatus and Method of Operating the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.
0 cites - US124865972025Apparatus and Method for Use with a Substrate Chamber
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124842402025Semiconductor Device and Methods of Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124802232025Apparatus and Method for Use with a Substrate Chamber
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124777942025Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US124778082025Semiconductor Device Having Multi-layer Epitaxial Structures with Different Lattice Constants
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US124777642025Method of Manufacturing a Source/drain of a Semiconductor Device Using Multiple Implantation Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124697422025Shallow Trench Isolation Forming Method and Structures Resulting Therefrom
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124697172025Systems, Methods, and Semiconductor Devices
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124577742025Multi-gate Device and Method of Fabrication Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US124577702025Source and Drain Engineering Process for Multigate Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US124513902025Trench Filling Through Reflowing Filling Material
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124380312025Bonding System and Method for Using the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US124379902025Semiconductor Device and Method of Manufacture
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124329632025Device Having an Air Gap Adjacent to a Contact Plug and Covered by a Doped Dielectric Layer
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US124263002025Transistor Source/drain Contacts and Methods of Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124191002025Transistor Isolation Regions and Methods of Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124190842025Methods of Forming Transistor Source/drain Regions Comprising Carbon Liner Layers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124143382025Nanostructure FET and Method of Forming Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124069382025Methods of Forming Alignment Structure with Trenches for Semiconductor Devices
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US124009102025Method for Forming Semiconductor Device with Monoclinic Crystalline Metal Oxide Capping Layer
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US123990672025Apparatus, System, and Method for Measuring the Temperature of a Substrate
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123962422025Nano-structure Transistors with Air Inner Spacers and Methods Forming Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- 0 cites
- US123681292025Temperature Controllable Bonder Equipment for Substrate Bonding
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123680182025Method for Ion Implantation Uniformity Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123693942025Semiconductor Device and Method of Forming Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123639452025Method of Forming Source/drain Regions with Quadrilateral Layers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US123476962025Laser De-bonding Carriers and Composite Carriers Thereof
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123493822025Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US123494262025Source/drain Device and Method of Forming Thereof
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123362372025Source/drain Regions of Semiconductor Device and Method of Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123362492025Gate Spacer and Formation Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US123362102025Source/drain Structure for Semiconductor Device
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123278112025Ion Implantation with Annealing for Substrate Cutting
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123175512025Semiconductor Devices Including Backside Power Rails and Methods of Manufacture
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- 0 cites
- US123007172025Semiconductor Device and Method of Manufacture
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US123007402025Metal Layer Protection During Wet Etching
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
- 0 cites
- US122887212025Fin Bending Reduction Through Structure Design
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122835152025Method and Device to Reduce Epitaxial Defects Due to Contact Stress Upon a Semicondcutor Wafer
Taiwan Semiconductor Manufacturing Company Limited
0 cites - US122781462025Fin Field-effect Transistor Device and Method of Forming the Same
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - US122781412025Semiconductor Devices and Methods of Manufacture
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US122665742025Flowable Chemical Vapor Deposition (FCVD) Using Multi-step Anneal Treatment and Devices Thereof
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122551712025Wafer Bonding System and Method of Using the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122552552025Method of Manufacturing a Finfet with Merged Epitaxial Source/drain Regions
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122551012025Ion Implantation of Nanostructures for Nano-fet
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122495922025Dynamic Bonding Gap Control and Tool for Wafer Bonding
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122437832025Epitaxial Source/drain Recess Formation with Metal-comprising Masking Layers and Structures Resulting Therefrom
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US122439312025Source/drain Epitaxial Layers for Transistors
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US122372112025Bonding System with Sealing Gasket and Method for Using the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US122305322025Semiconductor Device, Method of Manufacture by Monitoring Relative Humidity, and System of Manufacture Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US122182032025Integrated Circuit Structure and Method with Solid Phase Diffusion
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US122182222025Finfet Device and Method of Forming Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US122181962025Semiconductor Device and Method of Manufacture
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US122118362025Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US122119012025Semiconductor Device Having a Doped Fin Well
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US122059942025Sacrificial Layer for Semiconductor Process
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US121989312025Ion Implantation Method for Reducing Roughness of Patterned Resist Lines
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US121991562025Contact Formation with Reduced Dopant Loss and Increased Dimensions
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US121913042025Method of Manufacturing a Semiconductor Device and a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US121911742025Semiconductor Processing Tool and Method of Using an Embedded Chamber
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US121913692025Source and Drain Engineering Process for Multigate Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US121913782025Fin Field Effect Transistor Device Structure
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US121913932025Low Ge Isolated Epitaxial Layer Growth Over Nano-sheet Architecture Design for RP Reduction
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US121836322024Bottom Lateral Expansion of Contact Plugs Through Implantation
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US121702282024Semiconductor Device and Methods of Manufacturing
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- 0 cites
- US121488162024Devices Having a Semiconductor Material That Is Semimetal in Bulk and Methods of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US121321182024Semiconductor Device Having a Multilayer Source/drain Region and Methods of Manufacture
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US121194012024Semiconductor Device and Methods of Forming
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US121129772024Reducing Spacing Between Conductive Features Through Implantation
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120947782024Fin Field-effect Transistor Device and Method of Forming
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120947572024Method for Manufacturing Semiconductor Device with Semiconductor Capping Layer
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US120875922024Ambient Controlled Two-step Thermal Treatment for Spin-on Coating Layer Planarization
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US120878452024System and Methods of Manufacturing Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US120875782024Semiconductor Structure and Method of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120807592024Transistor Source/drain Regions and Methods of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120740712024Source/drain Structures and Method of Forming
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120740262024Integrated Photoresist Removal and Laser Annealing
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US120683952024Method for Forming an Undoped Region Under a Source/drain
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120683222024Method of Forming a Multi-layer Epitaxial Source/drain Region Having Varying Concentrations of Boron and Germanium Therein
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120574502024Epitaxy Regions with Large Landing Areas for Contact Plugs
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120403822024Method of Forming a Nano-fet Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US120340612024Method for Forming Semiconductor Structure
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US120093052024Semiconductor Device and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119964122024Semiconductor Device and Method of Forming Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119963172024Methods for Forming Isolation Regions by Depositing and Oxidizing a Silicon Liner
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119905112024Source/drain Device and Method of Forming Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119904042024Heat Dissipation for Semiconductor Devices and Methods of Manufacture
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119844912024Metal Layer Protection During Wet Etching
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US119843222024Semiconductor Device and Manufacturing Method Thereof
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites - 0 cites
- US119786762024Semiconductor Structure and Method of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119488402024Protective Layer Over Finfet and Method of Forming Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US119425502024Nanosheet Semiconductor Device and Method for Manufacturing the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US119357932024Dual Dopant Source/drain Regions and Methods of Forming Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US119233662024Transistor Isolation Regions and Methods of Forming the Same
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US119087512024Transistor Isolation Regions and Methods of Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119087082024Laser De-bonding Carriers and Composite Carriers Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US119011892024Ambient Controlled Two-step Thermal Treatment for Spin-on Coating Layer Planarization
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US119012182024Shallow Trench Isolation Forming Method and Structures Resulting Therefrom
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US119014552024Method of Manufacturing a Finfet by Implanting a Dielectric with a Dopant
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US118944382024Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
- US118550402023Ion Implantation with Annealing for Substrate Cutting
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - 0 cites
- US118551512023Multi-gate Device and Method of Fabrication Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US118551872023Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
- US118483612023Sacrificial Layer for Semiconductor Process
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
- 0 cites
- US117989892023Strained Nanowire CMOS Device and Method of Forming
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US117912042023Semiconductor Device with Connecting Structure Having a Doped Layer and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US117497202023Integrated Circuit Structure and Method with Solid Phase Diffusion
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US117423522023Vertical Semiconductor Device with Steep Subthreshold Slope
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - 0 cites
- US117283322023Semiconductor Device and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US117107772023Semiconductor Device and Method for Manufacture
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116950062023Method of Manufacturing a Semiconductor Device and a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116887932023Integrated Circuit Structure and Manufacturing Method Thereof
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US116888072023Semiconductor Device and Methods of Forming
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116886252023Method for Manufacturing Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US116770132023Source/drain Epitaxial Layers for Transistors
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US116521052023Epitaxy Regions with Large Landing Areas for Contact Plugs
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116521412023Strained Nanowire CMOS Device and Method of Forming
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US116520532023Semiconductor Device and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116463772023Semiconductor Device and Method of Manufacture
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116159822023Reducing Spacing Between Conductive Features Through Implantation
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116056352023Semiconductor Device and Method of Forming Same
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116055552023Trench Filling Through Reflowing Filling Material
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US116005342023Source/drain Structures and Method of Forming
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites - US115814252023Method for Manufacturing Semiconductor Structure with Enlarged Volumes of Source-drain Regions
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - US115750262023Source/drain Structure for Semiconductor Device
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites - US115690842023Method for Manufacturing Semiconductor Structure with Reduced Nodule Defects
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites - 0 cites
- US115631102023Semiconductor Structure and Method for Forming the Same
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites