Patents/Inventors

Yeahyun Gu

Hwaseong-siKR5 patents

5 Patents

US124313552025
Method and System for Forming Patterned Features on a Surface of a Substrate Using a Plasma-enhanced Cyclical Deposition Process
ASM IP Holding B. V.
0 cites
US122437422025
Method for Processing a Substrate
ASM IP Holding B.V.
0 cites
US121548242024
Substrate Processing Method
ASM IP Holding B.V.
0 cites
US120209342024
Substrate Processing Method
ASM IP Holding B.V.
0 cites
US116580352023
Substrate Processing Method
ASM IP Holding B.V.
0 cites