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Inventors
Yau-ching Yang
Hsinchu County
TW
5 patents
4 Patents
US12594644
2026
Polishing Head Assembly Having Recess and Cap
Globalwafers Co., Ltd.
0 cites
US12487185
2025
Systems and Methods for Processing Semiconductor Wafers Using Front-end Processed Wafer Edge Geometry Metrics
Globalwafers Co., Ltd.
0 cites
US12482662
2025
Systems and Methods for Producing Epitaxial Wafers
Globalwafers Co., Ltd.
0 cites
US12420376
2025
Polishing Head Assembly Having Recess and Cap
Globalwafers Co., Ltd.
0 cites