Patents/Inventors

Yasuyuki Unno

TochigiJP4 patents

3 Patents

US125963102026
Detection Device, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US123266682025
Detection Apparatus, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US120989132024
Detector That Detects Relative Positions of Marks While Blocking Non-interference Light
CANON KABUSHIKI KAISHA
0 cites