Patents/Inventors

Yasuyuki Motoshima

TokyoJP8 patents

8 Patents

US124726012025
Method of Checking Leakage of Fluid and Polishing Apparatus
EBARA CORPORATION
0 cites
US122576662025
Surface Height Measurement Method Using Dummy Disk
EBARA CORPORATION
0 cites
US121813452024
Method of Calibrating Radiation Thermometer and System Thereof
EBARA CORPORATION
0 cites
US120237772024
Temperature Regulating Apparatus and Polishing Apparatus
EBARA CORPORATION
0 cites
US119581612024
Polishing Apparatus Having Surface-property Measuring Device of Polishing Pad and Polishing System
EBARA CORPORATION
0 cites
US118970802024
Polishing Apparatus
EBARA CORPORATION
0 cites
US118399472023
Pad-temperature Regulating Apparatus, and Polishing Apparatus
EBARA CORPORATION
0 cites
US115773572023
Temperature Adjusting Device and Polishing Device
EBARA CORPORATION
0 cites