Patents/Inventors

Yasutoshi Tsubota

ToyamaJP16 patents

8 Patents

US126032532026
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Kokusai Electric Corporation
0 cites
US125753472026
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites
US123745272025
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US121548262024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US120401612024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US119086822024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites
US118697482024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US116642752023
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites