Patents/Inventors

Yasutaka Hama

Hsin-chuTW2 patents

3 Patents

US118878242024
Method of Cleaning Plasma Processing Apparatus and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118814102024
Substrate Processing Apparatus and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US117053092023
Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites