Patents/Inventors

Yasushi Sonoda

TokyoJP4 patents

5 Patents

US124424552025
Gas Supply Apparatus, Vacuum Processing Apparatus, and Gas Supply Method
Hitachi High-tech Corporation
0 cites
US123476562025
Plasma Processing Apparatus
Hitachi High-tech Corporation
0 cites
US120947812024
Manufacturing Method of Three-dimensional Semiconductor Device
HITACHI HIGH-TECH CORPORATION
0 cites
USD10089862023
Ion Shield Plate for Plasma Processing Apparatus
Hitachi High-tech Corporation
0 cites
US117767922023
Plasma Processing Apparatus and Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites