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Inventors
Yasunori Kawanabe
Kirishima
JP
9 patents
9 Patents
US12550231
2026
Ceramic Structure and Method Manufacturing Ceramic Structure
KYOCERA Corporation
0 cites
US12452961
2025
Ceramic Structure and Wafer System
KYOCERA Corporation
0 cites
US12238827
2025
Base Structure and Wafer Placing Device
KYOCERA Corporation
0 cites
US12183601
2024
Structural Body and Heating Apparatus
KYOCERA CORPORATION
0 cites
US12142498
2024
Ceramic Structure and Wafer System
KYOCERA Corporation
0 cites
US12016087
2024
Heater and Method of Production of Same
Kyocera Corporation
0 cites
US11923227
2024
Electrostatic Chuck and Method for Manufacturing Same
KYOCERA CORPORATION
0 cites
US11856659
2023
Board-like Structure and Heater System
KYOCERA Corporation
0 cites
US11818813
2023
Wafer-use Member, Wafer-use System, and Method for Manufacturing Wafer-use Member
KYOCERA Corporation
0 cites