Patents/Inventors

Yasunori Ejiri

ToyamaJP1 patent

2 Patents

US123548482025
Substrate Processing Apparatus, Substrate Processing Method, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites
US118668222024
Vaporizer, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites