Yasunobu Koshi

5 Patents

• US124676892025

  Furnace Opening Structure, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US124354392025

  Substrate Processing Method, Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus

  Kokusai Electric Corporation

  0 cites
• US122886832025

  Method of Manufacturing Semiconductor Device, Substrate Processing Method, Non-transitory Computer-readable Recording Medium and Substrate Processing Apparatus

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US121958482025

  Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  Kokusai Electric Corporation

  0 cites
• US116189472023

  Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites